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Deposition-Controller
CRTM Series
CRTM-9200
アルバック
CRTM-9200 is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.0022A ). An option enables deposition control for up to 4 materials simultaneously.
Features
- Ideal for low-rate deposition control with outstanding film thickness/rate resolution (0.0022?)
- Deposition control for 4 materials simultaneously (with option).
- Control of multilayer films with up to 99 layers
- Programs can be saved on USB memory .
- Can measure film thicknesses accurately, referencing history of films deposited on crystal oscillator (MLC function).
Specifications
| Film thickness/rate resolution |
0.0034 A (4MHz crystal) |
| Film thickness display range/display resolution |
0.001kA : 0 to 9.999kA |
| Deposition rate display range/display resolution |
0.001A/s : 0 to 9.999A/s |
| Supported sensor frequency | 4MHz, 5MHz, 6MHz |
| Number of sensors that can be attached | 2 (up to 8 with option) |
| Sampling rate | 250ms |
| Number of multilayer film layers supported | 99 layers |
| Number of deposition programs | 128 |
| Digital I/O | input : 12 channels programmable output : 16 channels programmable |
| Analog outputs | POWER (0 to 0.99 V) (RATE and THK are option.) |
| External dimensions (W x D x H; mm) | 480 x 300 x 149 |
該非判定結果報告書 Download
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