Multi-Stage Roots Type Dry Vacuum Pump
LR Series
LR
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Features
- 'Low temparature pump(LR series)
'The LR series pump is designed to shorten the pumping time for load lock, PVD processes and etc. - Excellent helium pumping capability
Canned motor for safety and ease of maintenance - Power failure protection
Pump withstands power interruptions of up to 500ms duration. - Superior resistance for corrosive gas(HR/UR series)
Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses. - Communication function
Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
Applications
- Sputtering equipment、Vapor deposition equipment、etc.
- Shorten the pumping time of load lock chamber
- Backing pump for turbo-molecular pumps and mechanical booster pumps
Specifications
Model | LR60 | LR90 | LR180 | LR421 | LR421-T | |
Max. pumping speed |
50Hz | 62 m3/h (1030 L/min) |
112 m3/h (1860 L/min) |
183 m3/h (3100 L/min) |
440 m3/h (7333 L/min) |
440 m3/h (7333 L/min) |
60Hz | 80 m3/h (1333 L/min) |
126 m3/h (2100 L/min) |
237 m3/h (3950 L/min) |
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Ultimate pressure | 5.0 Pa | |||||
Max. inlet pressure | Atmospheric pressure | |||||
Max. exhaust pressure | 1.0 to Atmospheric pressure Pa | |||||
Inlet diameter (type CE) | VG50(KF50) | VG80(KF50) | VG100 | |||
Outlet diameter | KF40 | VG50 | ||||
Weight | 180 kg | 245 kg | 335 kg | 415 kg | ||
Power *1 | Three phase |
200 VAC(50/60 Hz), 220 VAC(60 Hz) | 180~240 VAC/380~440 VAC(50/60 Hz) | |||
Current | At ultimate pressure |
6.9 A (at 200V) |
11.2 A (at 200V) |
18.9 A (at 200V) |
20.8 A (at 200V) |
|
At max. load |
7.3 A (at 200V) |
11.8 A (at 200V) |
20.6 A (at 200V) |
48.5 A (at 200V) |
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Cooling water Supply pressure |
0.1~0.3 MPa | 0.2~0.5 MPa | ||||
Cooling water In/Out differrencepressure |
>0.1 MPa | >0.2 MPa | ||||
Cooling water Flow rate | >5.0 L/min | >4.0 L/min | ||||
N2 gas | Supply pressure |
0.1~0.5 MPa | ||||
Regula- ted pressure |
0.05~0.1 MPa | |||||
N2 purge | Shaft purge | 5 SLM | ||||
Gas ballast | 0~45 SLM | None | 0~45 SLM |
*1: Please specify voltage at the time of ordering.
Model | LR300 | LR600 | LR1200 | LR1800 | LR3601 | LR3601-T (TT) |
LR3601-R | LR3601- TR (TTR) |
|
Pump | DRP | LR60 | LR90 | LR90 | LR180 | LR421 | LR421-T | LR421 | LR421-T |
MBP | PRC-03A | PRC-06A | PRC-012A | PRC-018A | PRC-036C | PRC-036C (-T) |
PRC-036D | PRC-036D (D-T) |
|
Max. pumping speed |
50Hz | 359 m3/h (5,980 L/min) |
653 m3/h (10,900 L/min) |
1,012 m3/h (16,900 L/min) |
1,701 m3/h (28,350 L/min) |
3,200 m3/h (53,333 L/min) |
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60Hz | 365m3/h (6,080 L/min) |
701m3/h (11,700 L/min) |
1,051m3/h (17,500 L/min) |
1,784m3/h (29,700 L/min) |
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Ultimate pressure |
0.67 Pa | ||||||||
Max. inlet pressure | Atmospheric pressure | ||||||||
Max. exhaust pressure |
1.0 to Atmospheric pressure Pa | ||||||||
Inlet diameter (type CE) |
VG80 (KF80) |
VG100 (KF100) |
VG150 (KF100) |
VG150 | |||||
Outlet diameter | KF40 | KF50 | |||||||
Surface treatment of MBP |
〇 *1 | 〇 *1 | 〇 *1 | 〇 *1 | × | T:× TT:× |
× | TR:× TTR:〇 |
|
Weight | 275 kg | 370 kg | 420 kg | 545 kg | 660 kg | 720 kg | 660 kg | 720 kg | |
Power *2 |
Three phase |
200 VAC(50/60 Hz), 220 VAC(60 Hz) | 180~240/380~440(50/60) | ||||||
Current | At ultimate pressure |
7.0 A (at 200V) |
12.3 A (at 200V) |
13.7 A (at 200V) |
21.4 A (at 200V) |
31.0 A(at 200V) 20.5 A(at 400V) |
35.4 A(at 200V) 20.5 A(at 400V) |
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At max. load |
9.6 A (at 200V) |
19.0 A (at 200V) |
24.2 A (at 200V) |
39.8 A (at 200V) |
58.4 A(at 200V) 40.5 A(at 400V) |
82.0 A(at 200V) 40.5 A(at 400V) |
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Cooling water Supply pressure |
0.1~0.3 MPa | 0.2~0.5 MPa | |||||||
Cooling water In/Out differrencepressure |
>0.1 MPa | 0.1~0.3 MPa | 0.2~0.5 MPa | ||||||
Cooling water Flow rate |
>5.0 L/min | >4.0 L/min | |||||||
N2 gas | Supply pressure |
0.1~0.5 MPa | |||||||
Regula- ted pressure |
0.05~0.1 MPa | ||||||||
N2 purge |
Shaft purge |
5 SLM | |||||||
Gas ballast |
0~45 SLM | None *3 | 0~45 SLM | None *3 | 0~45 SLM |
*1 MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*2 Please specify voltage at the time of ordering.
*3 Additionally, a pump with gasballast use is possible to quote. Please contact us for
the selection and quotation.
accessory
■Silencer (Option)
Model | Material | Surface treatment |
Weight (kg) |
Flange connection |
LR 300 |
LR 600 |
LR 1200 |
LR 1800 |
L& 3601 |
LR 60 |
LR 90 |
LR 180 |
LR 421 |
LR 421- T |
RS-01 + kitA |
SUS 304 |
GBB treatment |
4.1 kg |
KF40 | 〇 | - | - | - | - | 〇 | 〇 | - | - | - |
RS-01 + kitB |
KF40 | - | 〇 | 〇 | - | - | - | - | - | - | - | |||
RS-02 + kitA |
8.3 kg |
KF40 | 〇 | - | - | - | - | - | - | 〇 | - | - | ||
RS-02 + kitB |
KF40 | - | 〇 | 〇 | 〇 | - | - | - | - | - | - | |||
RS-03 + kitA |
Polished plate |
12.5 kg |
KF50 | - | - | - | - | - | - | - | - | 〇 | 〇 | |
RS-03 + kitB |
- | - | - | - | 〇 | - | - | - | - | - |