Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR

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Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.

Features

  • 'Low temparature pump(LR series)
    'The LR series pump is designed to shorten the pumping time for load lock, PVD processes and etc.
  • Excellent helium pumping capability
    Canned motor for safety and ease of maintenance
  • Power failure protection
    Pump withstands power interruptions of up to 500ms duration.
  • Superior resistance for corrosive gas(HR/UR series)
    Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.
  • Communication function
    Pump data including warnings and alarms are able to be exported. Extensive pump control is available.

Applications

  • Sputtering equipment、Vapor deposition equipment、etc.
  • Shorten the pumping time of load lock chamber
  • Backing pump for turbo-molecular pumps and mechanical booster pumps

Specifications

Model LR60 LR90 LR180 LR421 LR421-T
Max.
pumping
speed
50Hz 62 m3/h
(1030 L/min)
112 m3/h
(1860 L/min)
183 m3/h
(3100 L/min)
440 m3/h
(7333 L/min)
440 m3/h
(7333 L/min)
60Hz 80 m3/h
(1333 L/min)
126 m3/h
(2100 L/min)
237 m3/h
(3950 L/min)
Ultimate pressure 5.0 Pa
Max. inlet pressure Atmospheric pressure
Max. exhaust pressure 1.0 to Atmospheric pressure Pa
Inlet diameter (type CE) VG50(KF50) VG80(KF50) VG100
Outlet diameter KF40 VG50
Weight 180 kg 245 kg 335 kg 415 kg
Power *1 Three
phase
200 VAC(50/60 Hz), 220 VAC(60 Hz) 180~240 VAC/380~440 VAC(50/60 Hz)
Current At ultimate
pressure
6.9 A
(at 200V)
11.2 A
(at 200V)
18.9 A
(at 200V)
20.8 A
(at 200V)
At max.
load
7.3 A
(at 200V)
11.8 A
(at 200V)
20.6 A
(at 200V)
48.5 A
(at 200V)
Cooling water
Supply pressure
0.1~0.3 MPa 0.2~0.5 MPa
Cooling water In/Out
differrencepressure
>0.1 MPa >0.2 MPa
Cooling water Flow rate >5.0 L/min >4.0 L/min
N2 gas Supply
pressure
0.1~0.5 MPa
Regula-
ted
pressure
0.05~0.1 MPa
N2 purge Shaft purge 5 SLM
Gas ballast 0~45 SLM None 0~45 SLM

*1: Please specify voltage at the time of ordering.

Model LR300 LR600 LR1200 LR1800 LR3601 LR3601-T
(TT)
LR3601-R LR3601-
TR
(TTR)
Pump DRP LR60 LR90 LR90 LR180 LR421 LR421-T LR421 LR421-T
MBP PRC-03A PRC-06A PRC-012A PRC-018A PRC-036C PRC-036C
(-T)
PRC-036D PRC-036D
(D-T)
Max.
pumping
speed
50Hz 359
m3/h
(5,980
L/min)
653
m3/h
(10,900
L/min)
1,012
m3/h
(16,900
L/min)
1,701
m3/h
(28,350
L/min)
3,200
m3/h
(53,333
L/min)
60Hz 365m3/h
(6,080
L/min)
701m3/h
(11,700
L/min)
1,051m3/h
(17,500
L/min)
1,784m3/h
(29,700
L/min)
Ultimate
pressure
0.67 Pa
Max. inlet pressure  Atmospheric pressure
Max. exhaust
pressure
1.0 to Atmospheric pressure Pa
Inlet diameter
(type CE)
VG80
(KF80)
VG100
(KF100)
VG150
(KF100)
VG150
Outlet diameter KF40 KF50
Surface treatment
of MBP
〇 *1 〇 *1 〇 *1 〇 *1 × T:×
TT:×
× TR:×
TTR:〇
Weight 275 kg 370 kg 420 kg 545 kg 660 kg 720 kg 660 kg 720 kg
Power
*2
Three
phase
200 VAC(50/60 Hz), 220 VAC(60 Hz) 180~240/380~440(50/60)
Current At
ultimate
pressure
7.0 A
(at 200V)
12.3 A
(at 200V)
13.7 A
(at 200V)
21.4 A
(at 200V)
31.0 A(at 200V)
20.5 A(at 400V)
35.4 A(at 200V)
20.5 A(at 400V)
At
max.
load
9.6 A
(at 200V)
19.0 A
(at 200V)
24.2 A
(at 200V)
39.8 A
(at 200V)
58.4 A(at 200V)
40.5 A(at 400V)
82.0 A(at 200V)
40.5 A(at 400V)
Cooling water
Supply pressure
0.1~0.3 MPa 0.2~0.5 MPa
Cooling water In/Out
differrencepressure
>0.1 MPa 0.1~0.3 MPa 0.2~0.5 MPa
Cooling water
Flow rate
>5.0 L/min >4.0 L/min
N2 gas Supply
pressure
0.1~0.5 MPa
Regula-
ted
pressure
0.05~0.1 MPa
N2
purge
Shaft
purge
5 SLM
Gas
ballast
0~45 SLM None *3 0~45 SLM None *3 0~45 SLM

*1 MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*2 Please specify voltage at the time of ordering.
*3 Additionally, a pump with gasballast use is possible to quote. Please contact us for
  the selection and quotation.

accessory

Silencer (Option)

Model Material Surface
treatment
Weight
(kg)
Flange
connection
LR
300
LR
600
LR
1200
LR
1800
L&
3601
LR
60
LR
90
LR
180
LR
421
LR
421-
T
RS-01 +
kitA
SUS
304
GBB
treatment
4.1
kg
KF40 - - - - - - -
RS-01 +
kitB
KF40 - - - - - - - -
RS-02 +
kitA
8.3
kg
KF40 - - - - - - - -
RS-02 +
kitB
KF40 - - - - - - -
RS-03 +
kitA
Polished
plate
12.5
kg
KF50 - - - - - - - -
RS-03 +
kitB
- - - - - - - - -

Pumping Speed Curves

  • LR60
LR60_curve.png
  • LR90
LR90_curve.png
  • LR180
LR180_curve.png
  • LR421-T
LR421_curve.png
  • LR300 / LR600
LR300_600_curve.png
  • LR1200
LR1200_curve.png
  • LR1800
LR1800_curve.png
  • LR3601(-R / -TR / -TTR)
LR3601R_TR_TTR_curve.png
  • LR3601(-T / -TT)
LR3601T_TT_curve.png

    Dimension drawing

    • LR60LR60_en_size.png
    • LR90LR90_en_size.png
    • LR180LR180_en_size.png
    • LR300LR300_en_size.png
    • LR421LR421_en_size.png
    • LR421-TLR421-T_en_size.png
    • LR600LR600_en_size.png
    • LR1200LR1200_en_size.png
    • LR1800LR1800_en_size.png
    • LR3601LR3601_en_size.png
    • LR3601-RLR3601R_en_size.png
    • LR3601-TLR3601T_en_size.png
    • LR3601-TRLR3601TR_en_size.png
    • LR3601-TTLR3601TT_en_size.png

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