Introduction of vacuum equipments manufactured by ULVAC Group.
For more information on ULVAC products, purchase, and/or consideration, click here.
A vacuum valve is a valve used to control a vacuum environment. It is mainly used to adjust, stop, or release the flow of gas in a vacuum system (e.g. vacuum pump or vacuum device). In a vacuum environment, work is carried out at a pressure much lower than normal air pressure, so the valves are designed to be tightly sealed and to prevent gas leakage.
Type
Vacuum Angle Valve
ULVAC's vacuum angle valves (L-type valves) are all made of SUS, and in addition to the current JIS flange specifications, we have a wide range of ISO flanges, and the opening and closing can be done with double-acting and single-acting cylinders or manually, with four types of connection flanges and sizes ranging from 16A (5/8 inch) to 900A (36 inch), making this a lineup that can meet a wide range of needs.
Vacuum Angle Valve
Model:VLPｰSA020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA200JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA250JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA350JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA200KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSA250KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB200JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB250JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB200KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB250KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰSB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰMB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰMB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰMB063CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰMB100CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰMB160CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰU20
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰU22
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLPｰU36
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSA016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSA025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSA040KF
Stainless steel made valve from 5/8～2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is ISO-KF.
Vacuum Angle Valve
Model:VLBｰSA050KF
Stainless steel made valve from 5/8～2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is ISO-KF.
Vacuum Angle Valve
Model:VLBｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLBｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB020JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB025JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB040JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB050JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB065JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB080JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB100JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB150JH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB016KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB025KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB040KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB050KF
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB063KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB080KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB100KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB160KC
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰSB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰMB016CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰMB040CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰMB063CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰMB100CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Angle Valve
Model:VLHｰMB160CH
ULVAC's vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
Vacuum Gate Valve
Pendulum Valve
The pendulum valve is a large gate valve developed by ULVAC using its own technology.
It can be used in large vacuum equipment such as film deposition equipment for displays.
Pendulum Valve
Model:VFR
ULVAC's "Model:VFR" Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Pendulum Valve
Model:VFR-400
ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.
Pendulum Valve
Model:VFR-500
ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.