Applications
Check The Quality of Vacuum or Component Gas
| Process | Purposes | Applications |
|---|---|---|
| Semiconductor Manufacturing Equipment Process monitor |
Deterioration of crystallinity. | Residual moisture（H20）and leakage check. |
| LCD panel manufacturing equipment Process monitor |
Yield problem of liquid crystal surfaces. | Residual moisture（H20） check. |
| Deposition equipment for optical use Process monitor |
Yield problem of optical thin film surfaces. | Residual moisture（H20） check. |
| Vacuum heat treatment equipment Atmosphere monitor |
Degradation in brilliancy.Color unevenness. | Residual oxygen（O2）, hydrocarbon（CXHY）、, and leakage check. |
| Freeze drying equipment Process monitor |
Longer drying times. Changes in performance, efficacy, taste, and appearance. | Drying and inflow of impurities check. |
Application examples
Process gas monitor of deposition equipment
