Gas Analyzer（Process Gas Monitor）
Type
- Select series
- Select condition
- Sputtering Process
- Basic Process
- High Performance Process
- High Pressure Process
- Atmospheric Pressure Environmental Process
- CVD / ALD / Etching Process
- Software for Gas Analysis
Maximum Operating Pressure(Pa)
Mass Range(amu)
0 Items
Products
- Rough&Middle Vacuum Pump
- High Vacuum Pump
- Vacuum Gauge
- Gas Analyzer（Process Gas Monitor）
- Leak Detector
- High Speed Spectroscopic Ellipsometer
- Deposition Controller
- Vacuum Valve
- Power supply for plasma generation
- Vacuum-deposition electron beam source
- Vacuum transfer robot
- Small Film Forming Equipment
- Refrigerator (CRYO)
- Heat Treatment And Thermal Properties