Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
Glossary
| Term | pronunciation | Meaning |
|---|---|---|
| THK | thick | Film thickness |
| Z-ratio | Acoustic impedance correction values of deposits and quartz crystal plates. (Acoustic impedance: Transmissibility of vibration that is specific to substances.) |
|
| Tooling | Correction coefficient for differences between actual film thickness and value that CRTM displays. | |
| Density | Density of deposits | |
| XTAL FAIL | An error condition occurred in the oscillation and the name of the error | |
| ABORT | Interruption of a program | |
| spurious | A frequency that is higher than the frequency of the main oscillation, and oscillation tends to occur in the frequency region | |
| JUMP | A sudden change in frequency | |
| Explosive boil | Scattering of an object itself instead of vapor as a result of rapid heating |
Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
HOW TO
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