Fundamentals of Quartz Crystal Oscillation Type Deposition Controller

CRTM Common Terms

Term pronunciation Meaning
THK thick Film thickness
Z-ratio Acoustic impedance correction values of deposits and quartz crystal plates.
(Acoustic impedance: Transmissibility of vibration that is specific to substances.)
Tooling Correction coefficient for differences between actual film thickness and value that CRTM displays.
Density Density of deposits
XTAL FAIL An error condition occurred in the oscillation and the name of the error
ABORT Interruption of a program
spurious A frequency that is higher than the frequency of the main oscillation, and oscillation tends to occur in the frequency region
JUMP A sudden change in frequency
Explosive boil Scattering of an object itself instead of vapor as a result of rapid heating


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