Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
Quartz Crystals New UCR Series vs. Conventional Products
Renewed ULVAC's Quartz Crystals UCR Series!
We have thoroughly compared the performance of the new Quartz Crystals UCR series with that of conventional products.
Index
1. Specifications
2. Performance Comparison: Au
3. Performance Comparison: Ag
1. Specifications
Model | UCR-5MAU-12 | UCR-5MAG-12 | CR5G1 | CR5S1 | PKG5MHz金 | PKG5MHz銀 |
Frequency | 5MHz | |||||
Diameter | φ12.4 | |||||
Electrode | Au | Ag | Au | Ag | Au | Ag |
Supported |
CRTM-6000G/CRTM-9200 |
|||||
Mountable Sensor |
Single-Sensor (CRTM-0, 4, 6) Multi-Sensor (CRTM-12NS, M6) |
|||||
Electrode Surface | Standard | |||||
Package/ Sales Unit |
Carousel type case (12pcs) *Easy transfer to CRTM-12 |
Plastic box (5pcs) | Carousel type case (10pcs) |
2. Performance Comparison: Au
Frequency Change by Thermal Shock
The smaller frequency changes against thermal shock, the higher rate stability is. Besides, the smaller difference between each data is, the better the reproducibility is.
Halogen lamp irradiation starts at 10 sec-point, stops at 40 sec-point.
(ave: Mean value of frequency change, σ: Standard deviation)
Variation Distribution of Oscillation Frequency
The more crystals which have small frequency variation are, the more stable measurement is.
Measurement without deposition.
(ΔF: Frequency variation)
3. Performance Comparison: Ag
Frequency Change by Thermal Shock
The smaller frequency changes against thermal shock, the higher rate stability is. Besides, the smaller difference between each data is, the better the reproducibility is.
Halogen lamp irradiation starts at 10 sec-point, stops at 40 sec-point.
(ave: Mean value of frequency change, σ: Standard deviation)
Variation Distribution of Oscillation Frequency
The more crystals which have small frequency variation are, the more stable measurement is.
Measurement without deposition.
(ΔF: Frequency variation)
Download "Comparison of Quartz Crystals"
Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
HOW TO
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- The Others
- How to Choose The Best Products
- Old Models vs. New Models
- Troubleshooting