Fundamentals of Quartz Crystal Oscillation Type Deposition Controller

Renewed ULVAC's Quartz Crystals UCR Series!
We have thoroughly compared the performance of the new Quartz Crystals UCR series with that of conventional products.

Index

1. Specifications
2. Performance Comparison: Au
3. Performance Comparison: Ag

1. Specifications

Model UCR-5MAU-12 UCR-5MAG-12 CR5G1 CR5S1 PKG5MHz金 PKG5MHz銀
Frequency 5MHz
Diameter φ12.4
Electrode Au Ag Au Ag Au Ag

Supported
Deposition Controller

CRTM-6000G/CRTM-9200

Mountable
Sensor
Single-Sensor (CRTM-0, 4, 6)
Multi-Sensor (CRTM-12NS, M6)
Electrode Surface Standard
Package/
Sales Unit
Carousel type case (12pcs)
*Easy transfer to CRTM-12
Plastic box (5pcs) Carousel type case (10pcs)

2. Performance Comparison: Au

Frequency Change by Thermal Shock

The smaller frequency changes against thermal shock, the higher rate stability is. Besides, the smaller difference between each data is, the better the reproducibility is.

Halogen lamp irradiation starts at 10 sec-point, stops at 40 sec-point.
(ave: Mean value of frequency change, σ: Standard deviation)
newucr_compare_Au_1.png

Variation Distribution of Oscillation Frequency

The more crystals which have small frequency variation are, the more stable measurement is.

Measurement without deposition.
(ΔF: Frequency variation)
newucr_compare_Au_2.png

3. Performance Comparison: Ag

Frequency Change by Thermal Shock

The smaller frequency changes against thermal shock, the higher rate stability is. Besides, the smaller difference between each data is, the better the reproducibility is.

Halogen lamp irradiation starts at 10 sec-point, stops at 40 sec-point.
(ave: Mean value of frequency change, σ: Standard deviation)
newucr_compare_Ag_1.png

Variation Distribution of Oscillation Frequency

The more crystals which have small frequency variation are, the more stable measurement is.

Measurement without deposition.
(ΔF: Frequency variation)
newucr_compare_Ag_2.png

Download "Comparison of Quartz Crystals"

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