Troubleshooting
Cryopumps | 7 Maintenance Tips
To maintain good performance of a cryopump;
Although our cryopumps are designed to provide high reliability and long-time continuous operation, it is necessary to perform maintenance works regularly.
It is important to perform daily checks to prevent failure.
Seven key points
[Cryopump Assembly]
| 1. | Cryopanel temperature (Check temperature of cryo panels) |
→ | Below 20K: Normal Above 20K: Abnormal |
| 2. | Shield temperature (Check the electromotive force of CA thermocouple) |
→ | -5.5mV～-7.0mV: Normal -5.5mV以上: Abnormal (When the ambient temperature is 20°C) |
| 3. | Cryopump sound, vibration (hearing, bodily sensation) |
→ | Periodic: Normal Irregular: Abnormal |
[Compressor Unit]
| 4. | Helium charge pressure while a compressor is in operation (Read SUPPLY pressure gauge of a compressor unit) |
→ | Charge pressures vary depending on the models. Refer to the compressor instruction manual for the appropriate values. |
| 5. | Elapsed time meter(E.T.M) (Check the total operation time on ETM of a compressor unit) |
→ | Maintenance intervals vary depending on the models. Refer to the compressor instruction manual and replace adsorbers, cold head seals, or bearings. |
| 6. | Sound or vibration of a compressor unit while in operation. (by hearing or sensing bodily) |
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| 7. | Cooling water flow rate, inlet temperature (with water-cooled types) | → | Refer to compressor unit instruction manual. |
Troubleshooting
HOW TO
- Vacuum Tech Basics
- Fundamentals of Vacuum Pumps (Low to Medium Vacuum)
- Fundamentals of Vacuum Pumps (High Vacuum)
- Fundamentals of Vacuum Valves
- Fundamentals of Vacuum Gauges
- Fundamentals of Quartz Crystal Oscillation Type Deposition Controller
- Fundamentals of Leak Detection
- Fundamentals of High-Speed Spectroscopic Ellipsometer
- Fundamentals of Gas Analyzer (Process Gas Monitor)
- The Others
- How to Choose The Best Products
- Old Models vs. New Models
- Troubleshooting