Troubleshooting

To maintain good performance of a cryopump;
Although our cryopumps are designed to provide high reliability and long-time continuous operation, it is necessary to perform maintenance works regularly.
It is important to perform daily checks to prevent failure.


Seven key points

[Cryopump Assembly]

1. Cryopanel temperature
(Check temperature of cryo panels)
Below 20K: Normal
Above 20K: Abnormal
2. Shield temperature
(Check the electromotive force of CA thermocouple)
-5.5mV~-7.0mV: Normal
-5.5mV以上: Abnormal
(When the ambient temperature is 20°C)
3. Cryopump sound, vibration
(hearing, bodily sensation)
Periodic: Normal
Irregular: Abnormal

[Compressor Unit]

4. Helium charge pressure while a compressor is in operation
(Read SUPPLY pressure gauge of a compressor unit)
Charge pressures vary depending on the models. Refer to the compressor instruction manual for the appropriate values.
5. Elapsed time meter(E.T.M)
(Check the total operation time on ETM of a compressor unit)
Maintenance intervals vary depending on the models. Refer to the compressor instruction manual and replace adsorbers, cold head seals, or bearings.
6. Sound or vibration of a compressor unit while in operation.
(by hearing or sensing bodily)
7. Cooling water flow rate, inlet temperature (with water-cooled types) Refer to compressor unit instruction manual.

HOW TO

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept