(1) Prevention From Shock
Inside HLD, TMP is rotating at high speed. When HLD running, prevent shock and vibration that cause some trouble.
HELIOT shut down screen
Revolution of TMP displayed by bar graph.
(2) Take Care of Unexpected Pressure Increase
Pressure increase at ion source area can cause filament breaking or contamination inside ion source. The contamination leads to sensitivity reduction. The pressure increase leads to the accumulation of damage to TMP.
In such a case that the test object unexpectedly comes away in testing by vacuum method, the pressure at the ion source area can increase. Interlock circuit is equipped but impossible to protect the ion source completely from the pressure increase.
