Power supply for plasma generation
It is designed as a power supply for plasma generation. It is a versatile and stable power supply that incorporates know-how including applications. We have a lineup of power supplies with various features
Type
Maximum Rated Power
Rated Voltage
Oscillation Frequency
Product category
Rate Travelling Wave Power（Under 50Ω Load）
Option Type
0 Items
Products
- Rough&Middle Vacuum Pump
- High Vacuum Pump
- Vacuum Gauge
- Gas Analyzer（Process Gas Monitor）
- Leak Detector
- High Speed Spectroscopic Ellipsometer
- Deposition Controller
- Vacuum Valve
- Power supply for plasma generation
- Vacuum-deposition electron beam source
- Vacuum transfer robot
- Small Film Forming Equipment
- Refrigerator (CRYO)
- Heat Treatment And Thermal Properties